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Definition: feature size

The size of the elements on a chip, which is used to measure and designate the chip generation at the fabrication level (process technology). Feature size, which today is measured in nanometers, is either the minimum distance between the source and drain on a MOS transistor or half the distance between cells in a dynamic RAM chip (known as "DRAM half pitch"). Certain elements within the transistor may even be smaller than the published feature size for a technology generation. See process technology, MOSFET, dynamic RAM and chip.