Starting 2021 Previous New Name Name Features Intel 7 Enhanced FinFET SuperFin transistors Intel 4 7nm EUV lithography (see ultraviolet light) Starting 2023 New Name Date Features Intel 3 2023 Increased EUV Intel 20A 2024 RibbonFET transistors PowerVia interconnects Intel 18A 2025 Refined RibbonFETs